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Wafer-Bonding Workshop for MEMS Technologies, WBW-MEMS 2004. Special Issue
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Title
Wafer-Bonding Workshop for MEMS Technologies, WBW-MEMS 2004. Special Issue
Titel Supplements
11 - 12 October 2004, Halle: Two-day Workshop on "Wafer Bonding for MEMS Technologies"
Verlag
Springer
Verlagsort
Berlin
Datum
2006
Serie
Microsystem technologies
Konferenz
Wafer-Bonding Workshop for MEMS Technologies (WBW-MEMS) 2004