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2011
Conference Proceeding
Titel
Silicon nitride, silicon dioxide, and emerging dielectrics 11
Titel Supplements
Full length papers of the International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics to be held May 1 - 6, 2011 in Montreal, Canada, as part of the 219th meeting of the Electrochemical Society (ECS)
Beteiligt
Organisation
Electrochemical Society -ECS-, Dielectric Science and Technology Division