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Materials science of microelectromechanical systems (MEMS) devices II
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Title
Materials science of microelectromechanical systems (MEMS) devices II
Verlag
Materials Research Society
Verlagsort
Warrendale, PA, United States
Datum
2000
Serie
Materials Research Society Symposium Proceedings
ISSN
0272-9172
Konferenz
Symposium "Materials science of microelectromechanical systems (MEMS) devices" 1999