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Micromachining and microfabrication process technology XVIII
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Title
Micromachining and microfabrication process technology XVIII
Titel Supplements
5 and 7 February 2013, San Francisco, California, United States
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2013
Serie
Proceedings of SPIE
Konferenz
Conference "Micromachining and Microfabrication Process Technology" 2013