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Selected Papers Revised from the Proceedings of the Eighth International Symposium on Sputtering and Plasma Processes, ISSP 2005
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Title
Selected Papers Revised from the Proceedings of the Eighth International Symposium on Sputtering and Plasma Processes, ISSP 2005
Titel Supplements
8 - 10 June 2005, Kanazawa, Japan
Verlag
Pergamon
Verlagsort
New York, NY
Datum
2006
Serie
Vacuum
Konferenz
International Symposium on Sputtering and Plasma Processes (ISSP) 2005