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MEMS components and applications for industry, automobiles, aerospace, and communication
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Title
MEMS components and applications for industry, automobiles, aerospace, and communication
Titel Supplements
22 - 23 October 2001, San Francisco, USA
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2001
Serie
Proceedings of SPIE
Konferenz
Conference "MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication" 2001