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Advances in chemical-mechanical polishing
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Title
Advances in chemical-mechanical polishing
Titel Supplements
Symposium held April 13 - 15, 2004, San Francisco, California, U.S.A.; Papers presented at Symposium K, held at the 2004 MRS spring meeting
Verlag
MRS
Verlagsort
Pittsburgh, Pa.
Datum
2004
Serie
Materials Research Society Symposium Proceedings
Konferenz
Symposium K: "Advances in Chemical-Mechanical Polishing" 2004
Materials Research Society (Spring Meeting) 2004