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15th Workshop on Dielectrics in Microelectronics, WoDiM 2008. Papers
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Title
15th Workshop on Dielectrics in Microelectronics, WoDiM 2008. Papers
Titel Supplements
23 - 25 June 2008, Bad Saarow (Berlin)
Verlag
AIP Press
Verlagsort
New York, N.Y.
Datum
2009
Serie
Journal of vacuum science and technology. B, microelectronics and nanometers
ISSN
1071-1023
Konferenz
Workshop on Dielectrics in Microelectronics (WoDiM) 2008