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International Symposium on Microelectronics 1997. Proceedings
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Title
International Symposium on Microelectronics 1997. Proceedings
Titel Supplements
October 14 - 16, 1997, Pennsylvania Convention Center, Philadelphia
Institut
International Microelectronics and Packaging Society -IMAPS-
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
1997
Serie
Proceedings of SPIE
Konferenz
International Symposium on Microelectronics 1997