Options
2007
Conference Proceeding
Titel
Silicon Nitride, Silicon Dioxide and Emerging Dielectrics
Titel Supplements
Proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films and Emerging Dielectrics, Part of the 211th Meeting of the Electrochemical Society, Chicago, Illinois, May 6-10, 2007
Beteiligt
Organisation
Electrochemical Society -ECS-, Dielectric Science and Technology Division