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Reliability, packaging, testing and characterization of MEMS/MOEMS and nanodevices IX
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Title
Reliability, packaging, testing and characterization of MEMS/MOEMS and nanodevices IX
Titel Supplements
25 - 26 January 2010, San Francisco, California, United States; organized as a part of SPIE Photonics West on MOEMS-MEMS
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2010
Serie
Proceedings of SPIE
Konferenz
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices Conference 2010
Photonics West Conference 2010