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Advanced metallization and interconnect systems for ULSI applications in 1999. Proceedings of the conference
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Title
Advanced metallization and interconnect systems for ULSI applications in 1999. Proceedings of the conference
Institut
Univ. of California, Continuing Education in Engineering
Verlag
MRS
Verlagsort
Warrendale, Pa.
Datum
1998
Konferenz
Conference on Advanced Metallization and Interconnect Systems for ULSI Applications 1997