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Atomic layer deposit applications 8
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Title
Atomic layer deposit applications 8
Titel Supplements
Held during the PRiME 2012 joint international meeting; held in Honolulu, Hawaii, from October 7 to 12, 2012
Institut
Electrochemical Society -ECS-
Verlag
ECS
Verlagsort
Pennington, NJ
Datum
2012
Serie
ECS transactions
ISSN
1938-5862
Konferenz
Symposium "Atomic Layer Deposition Applications" 2012
Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME) 2012