Fraunhofer-Gesellschaft

YearTitle/AuthorDocument Type
2019Depth profiling of ion-implanted 4H-SiC using confocal Raman spectroscopy: Poster presented at International Conference on Silicon Carbide & Related Materials, September 29th - October 04th, 2019, Kyoto, Japan
Song, Ying; Xu, Zongwei; Liu, Tao; Rommel, Mathias; Wang, Hong; Fang, Fengzhou
Poster
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2019Influence of shallow pits and device design of 4H-SiC VDMOS transistors on in-line defect analysis by using PL scanning: Poster presented at 18th International Conference on Silicon Carbide & Related Materials, September 29th - October 04th, 2019, Kyoto, Japan
Kocher, Matthias; Schlichting, Holger; Kallinger, Birgit; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Poster
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2019Lifetime engineering in 4H-SiC materials and devices: Presentation held at 1st Sino-German Symposium on "Defect Engineering in SiC Device Manufacturing - Atomistic Simulations, Characterization and Processing" DESiC 2019, November 10-14, Beijing, China
Rommel, Mathias; Erlekampf, Jürgen; Kallinger, Birgit; Weiße, Julietta; Berwian, Patrick; Friedrich, Jochen; Erlbacher, Tobias
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2019Low-resistance ohmic contact formation by laser annealing of N-implanted 4H-SiC: Poster presented at International Conference on Silicon Carbide & Related Materials, September 29th - October 04th, 2019, Kyoto, Japan
Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Poster
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2019Pre-deposition interfacial oxidation and post-deposition interface nitridation of LPCVD TEOS used as gate dielectric on 4H-SiC: Poster presented at International Conference on Silicon Carbide & Related Materials, September 29th - October 04th, 2019, Kyoto, Japan
Lim, Minwho; Sledziewski, Tomasz; Rommel, Mathias; Erlbacher, Tobias; Kim, Hong-Ki; Kim, Seongjun; Shin, Hoon-Kyu; Bauer, Anton
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2019Resistless Ga+ beam lithography for flexible prototyping of nanostructures: Presentation held at 16th Vacuum Nanoelectronics Symposium, February 28th - March 1st, 2019, Tokyo, Japan
Rommel, Mathias
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2018Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation: Poster presented at 12th European Conference on Silicon Carbide & Related Materials, September 2nd - 6th, 2018, Birmingham, UK
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton
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2018Defect functional structures of 4H-SiC and diamond induced by ion implantation: MD simulation and spectral characterization: Presentation held at COSIRES 2018, The 2018 Computer Simulation of Radiation Effects in Solids, June 18-22, Shanghai, China
Xu, Zongwei; Zhao, Junlei; Djurabekova, Flyura; Rommel, Mathias; Nordlund, Kai
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2018Defects and carrier lifetime in 4H-Silicon Carbide: Presentation held at E-MRS Fall meeting 2018, Warsaw
Kallinger, Birgit; Erlekampf, Jürgen; Rommel, Mathias; Berwian, Patrick; Friedrich, J.; Matthus, Christian D.
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2018Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements: Poster presented at 12th European Conference on Silicon Carbide & Related Materials, September 2nd - 6th, 2018, Birmingham, UK
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zongwei; Erlbacher, Tobias; Bauer, Anton
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2018Dose dependent profile deviation of implanted aluminum in 4H-SiC during high temperature annealing: Poster presented at 22nd International Conference on Ion Implantation Technology, September 16th - 21st, 2018, Würzburg
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton
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2018Large-area layer counting of 2D materials via visible reflection spectroscopy: Poster presented at IMC19, 19th International Microscopy Congress, September 9 - 14, 2018, Sydney, Australia
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L.
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2018Principle of lifetime-engineering in 4H-SiC by ion implantation: Poster presented at ECSCRM 2018, 12th European Conference on Silicon Carbide & Related Materials, Birmingham, 2nd - 6th September 2018
Erlekampf, Jürgen; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen; Frey, Lothar; Erlbacher, Tobias
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2018Raman spectroscopy characterization of ion implanted 4H-SiC and its annealing effects: Poster presented at ECSCRM 2018, 12th European Conference on Silicon Carbide & Related Materials, September 2-6, 2018, Birmingham, UK
Xu, Zongwei; Song, Y.; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, F.Z.
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2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides: Presentation held at Integrated Optics: Devices, Materials, and Technologies XXI, SPIE, Photonics West, 30 January - 1 February 2017, San Francisco, California
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
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2017Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC: Poster presented at ICSCRM 2017, International Conference on Silicon Carbide and Related Materials, Washington, DC, September 17-22, 2017
Erlekampf, Jürgen; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
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2017Influence of Al doping concentration and annealing parameters on TiAl based ohmic contacts on 4H-SiC: Poster presented at International Conference on Silicon Carbide and Related Materials, September 17th - 22th, 2017, Washington, D.C., USA
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
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2017Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schöck, Johannes; Schlichting, Holger; Kallinger, Birgit; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
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2017Nanoimprinted surface relief Bragg gratings for sensor applications: Poster presented at Sensor Day 2017, Robinson College, Cambridge, Great Britain, October 20, 2017
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
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2017One-step fabrication of hierarchical structures: Poster presented at International Workshop on Advanced 3D Patterning, ad3pa 2017, Dresden, Germany, October 5-6, 2017
Rumler, Maximilian; Förthner, Michael; Kollmuss, Manuel; Baier, Leander; Stumpf, Florian; Becker, Marco; Rommel, Mathias; Frey, Lothar
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2017One-step fabrication of hierarchical structures by direct laser writing through PDMS molds: Presentation held at 4. Internationale Konferenz "Polymer Replication on Nanoscale", PRN 2017, Aachen, 8.5.2017 - 9.5.2017
Rumler, Maximilian; Förthner, Michael; Baier, Leander; Marhenke, Julius; Kollmuss, Manuel; Michel, Felix; Becker, Marco; Rommel, Mathias
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2017Resistless Ga+ beam lithography for flexible prototyping of nanostructures in different materials by reactive ion etching: Presentation held at FOR3NANO: Formation of 3D Nanostructures by Ion Beams, June 28 - June 30, Helsinki, Finland
Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Beuer, Susanne
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20164.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density: Poster presented at 11th European Conference on Silicon Carbide & Related Materials, September 25th - 29th, 2016, Halkidiki, Greece
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
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2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication: Poster presented at EMLC 2016, 32nd European Mask and Lithography Conference, Dresden, Germany, 21-22 June 2016
Rumler, Maximilian; Kollmuss, Manuel; Baier, Leander; Michel, Felix; Förthner, Michael; Becker, Marco; Rommel, Mathias; Frey, Lothar
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2016Quantification and reduction of deformations in multilayer soft-NIL stamps: Poster presented at NNT 2016, 15th International Conference on Nanoimprint and Nanoprint Technology, September 26-28, 2016, Braga, Portugal
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
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2016Quantification and reduction of deformations in multilayer soft-NIL stamps: Poster presented at MNE 2016, 42nd International Conference on Micro and Nano Engineering, 19-23 September 2016, Vienna, Austria
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
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2016Stamps for nanoimprint lithography - R&D at Fraunhofer IISB: Presentation held at NIL Industrial Day 2016, Vienna, March 10th - 11th, 2016
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, R.; Schmidt, H.
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2016Systematic characterization of doping profiles in 4H-SiC by point contact current voltage measurements: Poster presented at 11th European Conference on Silicon Carbide & Related Materials, September 25th - 29th, 2016, Halkidiki, Greece
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
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2015Bioactivation and functionalization of PDMS surfaces to control cellular adhesion behaviour by micro- or nanopatterning and plasma treatment: Poster presented at Workshop on µ-contact-printing and nanoimprint technology, Dresden, March 9th, 2015
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Gilbert, D.F.; Herrmann, M.; Frey, Lothar
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2015Characterization and application of nano- and microstructured PDMS surfaces for manipulation of cells: Presented at the 14th International Conference on Nanoimprint and Nanoprint Technology, NNT 2015. 22-24 October 2015, Napa, California
Scharin, Marina; Gilbert, D.; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Haering, A.; Friedrich, O.; Frey, Lothar
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2015Characterization and application of nano- and microstructured silicon-polymer-based surfaces for manipulation of cells: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, The Netherlands, 21-24 September 2015
Scharin, Marina; Haering, Aaron; Gilbert, D.; Dirnecker, Tobias; Stumpf, Florian; Rommel, Mathias; Friedrich, Oliver; Frey, Lothar
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2015Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, The Netherlands, 21-24 September 2015
Förthner, Michael; Rumler, Maximilian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
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2015Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers: Poster presented at the 14th International Conference on Nanoimprint & Nanoprint Technology, October 22-24, 2015, Napa, USA
Förthner, Michael; Rumler, Maximilian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
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2015Controlling cellular adhesion through micro- or nanopatterning of silicone-based surfaces to improve biomedical devices for in vitro based applications: Poster presented at Internationaler Kongress - Forum Life Science 2015, 11./12. März 2015, Technische Universität München-Garching
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Glibert, D.F.; Herrmann, M.; Frey, Lothar
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2015Defined area polymer working stamp manufacture for S&R UV-NIL by direct laser writing: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, The Netherlands, 21-24 September 2015
Rumler, Maximilian; Michel, Felix; Becker, Marco; Baier, Leander; Förthner, Michael; Rommel, Matthias; Schleunitz, Arne; Klein, Jan Jasper
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2015Experimental characterisation of FIB induced lateral damage on silicon carbide samples: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, The Netherlands, 21-24 September 2015
Stumpf, Florian; Rumler, Maximilian; Abu Quba, Abd Alaziz; Singer, Philipp; Rommel, Mathias
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2015Functionalization of PDMS surfaces through micro- or nano-patterning to control the cellular adhesion: Presentation held at 2nd Conference on Polymer Replication on Nanoscale, PRN 2015, 18.05.-19.05.2015, Kgs. Lyngby, Denmark
Scharin, Marina; Häring, Aron; Dirnecker, Tobias; Rommel, Mathias; Marhenke, Julius; Friedrich, O.; Gilbert, D.F.; Herrmann, Martin; Frey, Lothar
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2015Improvement of 4H-SiC material quality: Invited paper presented at the First International Symposium on SiC Spintronics, Vadstena, Sweden, June 15-17, 2015
Kallinger, Birgit; Kaminzky, Daniel; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen
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2015Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL): Poster presented at Workshop on µ-contact-printing and nanoimprint technology, Dresden, March 9th, 2015
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, M.; Belle, S.; Hellmann, R.; Klein, Jan Jasper
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2015Metastable defects in proton implanted and annealed silicon: Poster presented at GADEST 2015, 16th Conference on Gettering and Defect Engineering in Semiconductor Technology, September 20th to 25th, 2015, Bad Staffelstein, Germany
Jelinek, Moriz; Laven, Johannes G.; Ganagona, N.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
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2015Modeling of the electrochemical etch stop with high reverse bias across pn-junctions: Presentation held at ASMC 2015, 26th SEMI Advanced Semiconductor Manufacturing Conference, May 3-6, 2015, Saratoga Springs, New York
Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
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2015Modelling of effective minority carrier lifetimes in 4H-SiC n-type epilayers: Poster presented at International Conference on Silicon Carbide and Related Materials, ICSCRM 2015, Giardini Naxos, Italy, October, 4th - 9th, 2015
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
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2015Nano- and micrometer scale surface topography modification of Si (100) by Ga focused ion beam irradiation: Poster presented at BRAMAT 2015, 9th International Conference on Materials Science & Engineering, Brasov, Romania, 5-7 March 2015
Rai, Deepa; Stumpf, Florian; Frey, Lothar; Rommel, Mathias
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2015Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, Netherlands, 21-24 September 2015
Scharin, Marina; Newcomer, Kate; Al-Naimi, Abd; Dirnecker, Tobias; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
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2015Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays: Presented at the 14th International Conference on Nanoimprint and Nanoprint Technology, NNT 2015. 22-24 October 2015, Napa, California
Scharin, Marina; Newcomer, Kate; Dirnecker, Tobias; Al-Naimi, A.; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
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2015UV-NIL R&D at Fraunhofer IISB. Past examples and future challenges: Presentation held at NIL Industrial Day 2015, Berlin, March 19th - 20th, 2015
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, Robert; Schmitt, Holger
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2014Comparison of patterning silicon and silicon carbide using focused ion beam: Poster presented at IBMM 2014, 19th International Conference on Ion Beam Modification Materials, Leuven, Belgium, September 14-19, 2014
Veerapandian, S.K.P.; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, L.; Michler, Johannes; Frey, Lothar; Rommel, Mathias
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2014A DLTS study of hydrogen doped Czochralski-grown silicon: Poster presented at IBMM 2014, 19th International Conference on Ion Beam Modification Materials, Leuven, Belgium, September 14-19, 2014
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, S.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
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2014Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL): Poster presented at NNT 2014, 13th International Conference on Nanoimprint and Nanoprint Technology, Kyoto, Japan, October 22-24, 2014
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
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2014Large area fabrication of plasmonic color filters using UV-SCIL: Presentation held at MNE 2014, 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland, September 22-26, 2014
Rumler, Maximilian; Fader, R.; Förthner, M.; Haas, A.; Rommel, M.; Bauer, A.J.; Frey, L.
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2014Large area fabrication of plasmonic color filters using UV-SCIL: Presentation held at NNT 2014, Kyoto, Japan
Rumler, Maximilian; Fader, Robert; Förthner, Michael; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
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2014Nanoscale characterization of high-k dielectrics by electrical SPM methods: Presentation held at Novel High k Application Workshop, March 24, 2014, Dresden
Rommel, Mathias
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2014NanoSPV - SPM Technique for Measuring Minority Charge Carrier Diffusion Lengths with High Spatial Resolution: Presentation held at International Conference on Nanoscience and Technology, ICN+T 2014, 21.07. - 25.07.2014, Vail, Colorado
Stumpf, Florian; Rommel, M.; Bauer, A.J.; Frey, L.; Hitzel, F.; Stadelmann, A.
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2014NanoSPV - SPM Technique for the Quantitative Measurement of Minority Charge Carrier Diffusion Lengths with High Spatial Resolution: Presentation held at European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2014, September, 22. - 26., 2014, Amsterdam, The Netherlands
Stumpf, Florian; Rommel, Mathias; Bauer, Anton; Frey, Lothar; Hitzel, Frank; Stadelmann, Anja; Bartel, Til
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2014Optical polymers with tunable refractive index for nanoimprint technologies: Poster presented at MNE 2014, 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland, September 22-26, 2014
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Förthner, Michael; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Winter, Benjamin; Spiecker, Erdmann
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2014Optical polymers with tunable refractive index for nanoimprint technologies: Poster presented at NNT 2014, 13th International Conference on Nanoimprint & Nanoprint Technology, Kyoto, Japan, October 22-24, 2014
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann
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2014Process development for nanoimprint at Fraunhofer IISB: Presentation held at SUSS Technology Forum Nanoimprint, June 24, 2014, Grenoble
Fader, Robert; Rumler, Maximilian; Scharin, Marina; Förthner, Michael; Rommel, Mathias
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2014Silicon carbide in power electronics: Overcoming the obstacle of bipolar degradation: Presentation held at TMS Annual Meeting 2014 at San Diego, California, February 16-20, 2014; invited talk
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Friedrich, Jochen; Rommel, Mathias
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2014Structure placement accuracy of wafer level stamps for substrate conformal imprint lithography: Poster presented at NNT 2014, 13th International Conference on Nanoimprint and Nanoprint Technology, Kyoto, Japan, October 22-24, 2014
Fader, Robert; Förthner, Michael; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Verschuuren, Marc; Butschke, Jörg; Irmscher, Mathias; Storace, Eleonora; Ji, Ran; Schömbs, Ulrike
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2013Accuracy of wafer level alignment with substrate conformal imprint lithography: Presentation held at 12th International Conference on Nanoimprint and Nanoprint Technology (NNT), October 21 - 23, 2013, Barcelona, Spain
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Verschuuren, M.A.; Laar, R. van de; Ji, R.; Schömbs, U.
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2013Alignment accuracy in a mask aligner using substrate conformal imprint lithography (SCIL): Poster presented at 39th International Conference on Micro and Nano Engineering, MNE 2013, 16 - 19 September 2013, London
Schömbs, Ulrike; Fader, Robert; Verschuuren, Marc
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2013Comparison of carrier lifetime measurements and mapping using time resolved photoluminescence and µ-PCD: Poster presented at ICSCRM 2013, International Conference on Silicon Carbide and Related Materials, September 29 - October 4, 2013, Miyazaki, Japan
Kallinger, Birgit; Rommel, Mathias; Lilja, L.; Hassan, J.; Booker, Ian; Janzen, Erik; Bergman, J.P.
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2013Evaluation of UV-SCIL resists for structure transfer using plasma etching: Presentation held at NNT 2013, 12th International Conference on Nanoimprint & Nanoprint Technology, Barcelona, Catalonia, October 21-23, 2013
Rumler, Maximilian; Rusch, O.; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Brehm, Markus; Kraft, Andreas
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2013HCl assisted growth of thick 4H-SiC epilayers for bipolar devices: Poster presented at ICSCRM 2013, International Conference on Silicon Carbide and Related Materials, September 29 - October 4, 2013, Miyazaki, Japan
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
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2013In situ ATR monitoring of cross-link and diffusion behavior of thin-film epoxy and sol-gel based imprint resists: Poster presented at 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, October 21-23, 2013, Barcelona, Spain
Verschuuren, Marc; Fader, Robert; Brakel, Remco van; Hurxkens, Gert-Jan
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2013Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL): Presentation held at 39th International Conference on Micro and Nano Engineering, 16.-19.09.2013, London
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.; Reboud, V.; Landis, S.
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2013Micromolding of micropatterned PDMS surfaces to define the adhesive behavior of human cells in vitro: Poster presented at Jahrestagung der Deutschen Gesellschaft für Biomaterialien, 26. - 28. September 2013, Erlangen
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, J.; Rumler, Maximilian; Herrmann, Benjamin; Fader, Robert; Frey, Lothar; Herrmann, Martin
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2013Patterning flat and tilted 4H-SiC by Ga+ resistless lithography and subsequent reactive ion etching: Poster presented at MNE 2013, 39th International Conference on Micro- and Nano-Engineering 2013, London, United Kingdom
Beuer, Susanne; Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Bauer, Anton J.; Frey, Lothar
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2013Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applications: Poster presented at 9th NanoBioEurope (NBE) International Congress & Exhibition - Toulouse 10-12 June 2013
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Rumler, Maximilian; Fader, Robert; Bauer, Anton J.; Frey, Lothar; Hermman, Martin
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2012Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM: Presentations held at 17th Workshop on Dielectrics in Microelectronics, June 25-27, Dresden, Germany
Rommel, Mathias; Jambreck, Joachim D.; Murakami, Katsuhisa; Lemberger, Martin; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
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2012Effect of HfO2 polycrystallinity on distribution of the CAFM-induced TDDB in high-k gate stacks: Poster at 17th Workshop on Dielectrics in Microelectronics, June 25-27, 2012, Dresden
Iglesias, V.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Porti, M.; Martin-Martinez, J.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Bersuker, G.
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2012Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication: Poster at 11th International Conference on Nanoimprint & Nanoprint Technology, October 24-26, 2012, Silverado Resort, Napa, California
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Matthias; Bauer, Anton J.; Frey, Lothar
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2012Fabrication and application of shielded probes for conductive AFM measurements: Poster at Seeing at the Nanoscale 2012, 10th annual scientific conference, July 09th - 11th 2012, Bristol, UK
Jambreck, Joachim D.; Rommel, Mathias; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
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2012Functional epoxy polymer for direct nano-imprinting of micro optical elements: Poster at NNT 2012, 11th International Conference on Nanoimprint & Nanoprint Technology, Napa, California
Fader, Robert; Landwehr Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Völkel, Reinhard; Brehm, Markus; Kraft, Andreas
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2012Influence of epilayer thickness and structural defects on the minority carrier lifetime in 4H-SiC: Poster at European Conference on Silicon Carbide and Related Materials, ECSCRM 2012, September 2 - 6, 2012, Saint Petersburg
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Azizi, Maral; Rommel, Mathias; Hecht, Christian; Friedrichs, Peter
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2012Nanoscale characterization of TiO2 films grown by atomic layer deposition: Poster at 17th Workshop on Dielectrics in Microelectronics, June 25-27, 2012, Dresden
Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Hudec, Boris; Rosova, A.; Hueková, K.; Fröhlich, Karol; Kasikov, A.; Ramula, R.; Aarik, J.; Han, J.H.; Han, S.; Lee, W.; Song, S.J.; Hwang, C.S.
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2012Plasma-assisted atomic layer deposition of alumina at room temperature: Poster at 17th Workshop on Dielectrics in Microelectronics (WoDiM 2012), June 25-27, 2012, Dresden
Lemberger, Martin; Fromm, Timo; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
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2011Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy: Poster at International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, May 23-26, 2011, Grenoble, France
Murakami, K.; Rommel, M.; Yanev, V.; Bauer, A.J.; Frey, L.
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2011Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography: Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
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2011Novel polymers for UV-enhanced substrate conformal imprint lithography: Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
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2011Simple and efficient method to fabricate nano-cone arrays by FIB milling demonstrated on planar substrates and on protruded structures: Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
Rommel, M.; Bauer, A.J.; Frey, L.
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2011UV-enhanced substrate conformal imprint lithography using an epoxy based polymer: Poster at NNT 2011, 10th International Conference on Nanoimprint and Nanoprint Technology, 19.10.-21.10.2011, The Shilla Jeju, Korea
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Kraft, A.
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2010Characterization of thickness variations of thin dielectric layers at a nanoscale using Scanning Capacitance Microscopy: Poster at WoDiM 2010, 16th Workshop on Dielectric Materials 2010, 28.06.-30.06.2010, Bratislava, Slovak Republic
Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
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2010Direct imprinting, post processing, and characterization of functional UV-curing materials: Poster at NNT 2010, 9th International Conference on Nanoimprint and Nanoprint Technology, Copenhagen, Denmark
Schmitt, H.; Kett, F.; Fader, R.; Rommel, M.; Bauer, A.J.; Hornung, M.; Frey, L.
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2010Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminum implanted 4H SiC: Poster at ECSCRM 2010, 8th European Conference on Silicon Carbide and Related Materials, 29.08.-02.09.2010, Oslo, Norway
Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.
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2010Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Poster at MNE 2010, 36th International Conference on Micro and Nano Engineering, Genoa, Italy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
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2010Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application: Poster at 14th European FIB Users Group Meeting (EFUG 2010), Gaeta, Italy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
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2009Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale: Poster at 16th biannual conference of Insulating Films on Semiconductors (INFOS 2009), 29.06.-01.07.2009, Cambridge University, UK
Yanev, V.; Erlbacher, T.; Rommel, M.; Bauer, A.J.; Frey, L.
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2009Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing: Poster at the MNE 2009, 35th International Conference on Micro and Nano Engineering, Ghent, Belgium
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
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2009Full wafer microlens replication by UV imprint lithography: Poster at the MNE 2009, 35th International Conference on Micro and Nano Engineering, Ghent, Belgium
Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Bich, A.; Eisner, M.; Voelkel, R.; Hornung, M.
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2009Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
Rommel, M.; Jambreck, J.; Ebm, C.; Platzgummer, E.; Bauer, A.; Frey, L.
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2008Electrical AFM techniques for the advanced characterization of materials in semiconductor technology: Poster at NanoScale VI, Berlin, Germany, July 9-11, 2008
Yanev, V.; Rommel, M.; Spoldi, G.; Beuer, S.; Amon, B.; Petersen, S.; Lugstein, A.; Steiger, A.; Bauer, A.J.; Ryssel, H.
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2008Experimental observation of FIB induced lateral damage on silicon samples: Poster at 34th International Conference on Micro&Nano Engineering, MNE 2008, Athens
Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H.
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2008UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale: Poster at MNE 2008, 34th International Conference on Micro and Nano Engineering, Athens, Greece
Schmitt, H.; Amon, B.; Petersen, S.; Rommel, M.; Bauer, A.J.; Ryssel, H.
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2007Custom-specific UV nanoimprint templates and life-time of antisticking layers: Poster at MNE 2007, 33rd International Conference on Micro and Nano-Engineering, Copenhagen, Denmark
Schmitt, H.; Zeidler, M.; Rommel, M.; Bauer, A.J.; Ryssel, H.
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2007Degradation of the minority carrier lifetime caused by Mn-correlated defects in Ga-implanted Si:P: Poster at 17th International Photovoltaic Science and Engineering Conference (PVSEC-17), 03.-07.12.2007, Fukuoka, Japan
Beljakowa, S.; Pensl, G.; Rommel, M.
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2007Electrical characterization of low dose focused ion beam induced damage in silicon by scanning spreading resistance microscopy: Poster at ICN+T 2007, International Conference on Nano Science and Technology 2007, Stockholm, Sweden
Beuer, S.; Yanev, V.; Rommel, M.; Bauer, A.J.; Ryssel, H.
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2007High throughput manufacturing process of probes for sub-50nm scanning thermal microscopy: Poster at ICN+T 2007, International Conference on Nano Science and Technology 2007, 02.-06.07.2007, Stockholm, Sweden
Richter, C.; Engl, W.; Weinzierl, P.; Sulzbach, T.; Beuer, S.; Petersen, S.; Stockmeyer, J.; Rommel, M.
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2007Recent improvements in the integration of field emitters into scanning probe microscopy sensors: Poster at MNE 2007, 33rd International Conference on Micro- and Nano-Engineering 2007, Copenhagen, Denmark
Beuer, S.; Rommel, M.; Petersen, S.; Amon, B.; Sulzbach, T.; Engl, W.; Bauer, A.J.; Ryssel, H.
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2007Verification of grain boundaries in annealed thin ZrO2 films by electrical AFM technique: Poster at E-MRS Fall Meeting, September 17-21 2007, Warsaw
Yanev, V.; Paskaleva, A.; Weinreich, W.; Lemberger, M.; Petersen, S.; Rommel, M.; Bauer, A.J.; Ryssel, H.
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2006Accurate parameter extraction for the simulation of direct structuring by ion beams: Poster at MNE 2006, 32nd International Conference on Micro- and Nano- Engineering 2006, Barcelona, Spain
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H.
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2005Characterization of interface state densities by photocurrent analysis. Comparison of results for different insulator layers: Poster at INFOS05 - 14th Biennial Conference on Insulating Films on Semiconductors, Leuven, Belgium
Rommel, M.; Groß, M.; Ettinger, A.; Bauer, A.J.; Frey, L.; Ryssel, H.
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