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1988
Conference Paper
Titel
Dielectric gassensors based on heteropolysiloxanes
Alternative
Dielektrische Gassensoren auf der Basis von Heteropolysiloxanen
Abstract
The adsorption of gases can change the dielectric properties (permittivity and conductivity) of insulator. Dielectric gas-sensors use this effect for the direct measurement of gas-concentrations. Adsorbing materials: Useful adsorbing materials for gasadsorption are organically modified silicates (heteropolysiloxanes). Sensor device: The sensor device is an interdigitated, thin film capacitor on a silica-glass substrate. These devices were coated with a thin heteropolysiloxane film using a spin-on-process. Results: The sensors show a relatively high sensitivity towards NH3, SO2 and NO2 (Delta C/Co=0,03 (1 v% NH3), Delta C/Co=0,03 (1 v% SO2), Delta C/Co=0,13 (1 v% NO2)). No sensor-signal was found towards CO, CH4 and CO2. (IFT)
Konferenz
Language
English