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Diamond membrane with controlled stress for submicron lithography
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1993
Journal Article
Titel
Diamond membrane with controlled stress for submicron lithography
Author(s)
Schäfer, L.
Bluhm, A.
Klages, C.-P.
Löchel, B.
Buchmann, L.-M.
Huber, H.-L.
Zeitschrift
Diamond and Related Materials
DOI
10.1016/0925-9635(93)90168-2
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT