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Development of industrial low temperature PVD technique of c-BN for long lifetime products
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1995
Conference Paper
Titel
Development of industrial low temperature PVD technique of c-BN for long lifetime products
Author(s)
Lüthje, H.
Hauptwerk
4th International Conference on Plasma Surface Engineering 1994. Papers
Konferenz
International Conference on Plasma Surface Engineering 1994
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST