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Determination of the pore size and the vertical structure of nanoporous aluminium oxide membranes

: Heilmann, A.; Altmann, F.; Katzer, D.; Müller, F.; Sawitowski, T.; Schmid, G.


Applied surface science 144/145 (1999), S.682-685
ISSN: 0169-4332
Fraunhofer IWM ()

The pore geometry of nanoporous aluminium oxide membranes which were prepared by anodization of aluminium in polyprotic acids were observed using focused ion beam technology (FIB) and high resolution scanning electron microscopy (SEM). For demonstraton of the columnar structure of the nanopores, depth profiles were prepared with the FIB technology. Based on the detailed information about the pore geometry, the inner surfaces of the pores were calculated.