Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Depth profile analysis of hydrogenated carbon layers on silicon by x-ray photoelectron spectroscopy, Auger electron spectroscopy, electron energyloss spectroscopy, and secondary ion mass spectrometry

 
: Sander, P.; Kaiser, U.; Altebockwinkel, M.; Wiedmann, L.; Benninghoven, A.; Sah, R.E.; Koidl, P.

Journal of vacuum science and technology A. Vacuum, surfaces and films 5 (1987), Nr.4, S.1470-1473 : Abb.,Lit.
ISSN: 0734-2101
Englisch
Zeitschriftenaufsatz
Fraunhofer IAF ()
amorpher Kohlenstoff; Elektronenspektroskopie; Grenzflächeneigenschaft; SIMS

Abstract
Hydrogenated amorphous carbon layers (a-C:H) on silicon show substantial amounts of silicon carbide in the interface, which has been identified with x-ray photoelectron spectroscopy and Auger electron spectroscopy by comparison to Si, C, and SiC standards. The quality of such layers, in particular, adhesion and hardness, becomes better with increasing width of the depth distribution of this interfacial carbide. (IAF)

: http://publica.fraunhofer.de/dokumente/PX-9247.html