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The deposition of hard crystalline Al2O3 layers by means of bipolar pulsed magnetron sputtering
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1996
Conference Paper
Titel
The deposition of hard crystalline Al2O3 layers by means of bipolar pulsed magnetron sputtering
Author(s)
Fietzke, F.
Goedicke, K.
Hempel, W.
Hauptwerk
23rd International Conference on Metallurgical Coatings and Thin Films 1996. Papers presented at the Conference
Konferenz
International Conference on Metallurgical Coatings and Thin Films 1996
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP