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Deposition of BaTiO3 thin films by a hybrid DC-field enhanced PLD-process

: Husmann, A.; Mertin, M.; Klotzbücher, T.; Kreutz, E.W.


Applied surface science 109/110 (1997), S.293-298 : Ill., Lit.
ISSN: 0169-4332
Fraunhofer ILT ()
excimer laser radiation; ion bombardment; large-area substrate; laser-assisted film deposition; laser radiation; microsystem technology; PLD-process; polarization; sintered multicomponent ceramics; sputter deposition

BaTiO3, thin films are deposited onto (111)-Si/Ti/Pt using a hybrid DC-field enhanced pulsed laser deposition (PLD)-technique with excimer laser radiation. Space- and time-resolved plasma emission spectroscopy (PES) is used for determination of the mean velocity of the particle species within the plasma/vapour. The structural properties of the films are characterised by XRD-measurements and micro-Raman spectroscopy. The electrical properties are analysed by impedance measurements. The electric field influences the number of excited and ionised particles within the ambient gas and plasma, caused by a discharge in the ambient gas and interaction between ambient gas and plasma. The hybrid process allows production of crystalline films of the tetragonal phase at reduced deposition temperatures. Dielectric constants of up to epsilon(r) = 320 are obtained.