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Deformable micromirror devices as phase modulation high resolution light valves



Sensors and Actuators. A 54 (1996), Nr.1-3, S.536-541 : Lit.
ISSN: 0924-4247
International Conference on Solid-state sensors and actuators <8, 1995, Stockholm>
Eurosensors <9, 1995, Stockholm>
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Beugung; CMOS-Schaltung; Lichtventil; Mikromechanik; Mikrospiegel; Mikrosystem

We report on two different technologies for deformable micromirror devices as phase-modulating light valves for high-resolution optical applications. Both technologies are compatible with a 30V CMOS technology for active matrix addressing. We have developed and fabricated a 512 x 464 pixel light valve with CMOS addressing and viscoelastic layer deformable mirrors on top. The performance of the light valve has been demonstrated by an application for fast submicron laser direct writing. Furthermore, we report promising results on cantilever-type deformable mirrors to be integrated with the CMOS active matrix.