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Deformable micromirror devices as phase modulation high resolution light valves

: Kück, Heinz; Doleschal, Wolfgang; Gehner, Andreas; Grundke, W.; Melcher, Rolf; Paufler, Jörg; Seltmann, Rolf; Zimmer, Günter

Foundation for Sensor and Actuator Technology, Stockholm:
8th International Conference on Solid-State Sensors and Actuators 1995 and Eurosensors IX. Digest of technical papers. Vol. 1. Sessions A1-PD6. Papers No. 1-231
Stockholm: Congrex, 1995
ISBN: 91-630-3473-5
International Conference on Solid-state sensors and actuators <8, 1995, Stockholm>
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Beugung; CMOS-Schaltung; Lichtventil; Mikromechanik; Mikrospiegel; Mikrosystem

We report on two different technologies for deformable micromirror devices as phase modulating light valves for high resolution optical applications. Both technologies are compatible with a 30V CMOS technology for active matrix addressing. We have developed and fabricated a 512 x 464 pixel light valve with CMOS addressing and viscoelastic layer deformable mirrors on top. The performance of the light valve has been demonstrated by an application for fast submicron laser direct writing. Furthermore we report on promosing results on cantilever-type deformable mirrors to be integrated with the CMOS active matrix.