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Definition and measurement rule for voltage resolution of contactless testing systems based on electron-beam or photoemission methods

 
: Clauberg, R.; Lackmann, R.

European Conference on Electron and Optical Beam Testing of Integrated Circuits
1991
S.206-210
European Conference on Electron and Optical Beam Testing of Integrated Circuits <3, 1991, Como>
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
Elektronenstrahlmeßtechnik; Spannungsauflösung; Teststandard

Abstract
A general definition and corresponding measurement rules are provided for voltage resolution of contactless chip testing systems. The emphasis is on a practical measurement rule which allows the determination of the voltage resolution solely from parameters which are accessible to every user. To achieve this goal, first two characteristics parameters are determined which define voltage resolution from the physical effects limiting the resolution and then a measurement rule is provided to measure these parameters by means of a well-defined test signal. This procedure will allow an unambiguous comparison of contactless testing systems as well as of the results obtained with them.

: http://publica.fraunhofer.de/dokumente/PX-9094.html