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Current induced light emission from nanocrystalline silicon structures


Institute of Electrical and Electronics Engineers -IEEE-:
MEMS '92. IEEE Workshop on Micro Electro Mechanical Systems. An investigation of micro structures, sensors, actuators, machines and robots
New York/N.Y., 1992
ISBN: 0-7803-0497-7
Workshop on Micro Electro Mechanical Systems (MEMS) <1992, Travemünde>
Fraunhofer IFT; 2000 dem IZM eingegliedert
electroluminescence; porous silicon

The photoluminescence and electroluminescence of light emitting porous silicon (LEPOS) is described. The porous silicon is made by anodic dissolution of silicon in HF with an applied electrical current and illumination with visible light. Photoluminescence is observed using ultraviolet light, visible electroluminescence is achieved by applying a voltage to a solid state contact on top of the porous layer. The luminescence, the structure and the composition of the LEPOS are studied.