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1989
Conference Paper
Titel
Critical assessment of diamondlike carbon.
Alternative
Kritische Bewertung diamantartiger Kohlenstoffschichten
Abstract
An overview is given on the deposition, properties and applications of dense amorphous carbon films with diamondlike properties. Emphasis will be on the condensation of energetic hydrocarbon ions leading to the formation of amorphous hydrogenated carbon (a-C:H) films. Plasma deposition onto biased substrates and the structure and properties of the resulting a-C:H films are discussed.