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Compatible CMOS microsystems for automotive and for medical applications

: Kersjes, R.A.; Mokwa, W.

Chau, K.; Roop, R.M. ; Sandia National Laboratories, Albuquerque/N.Mex; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; National Institute of Standards and Technology -NIST-:
Micromachined Devices and Components II
Bellingham, Wash.: SPIE, 1996 (SPIE Proceedings Series 2882)
ISBN: 0-8194-2280-0
S.37-48 : Lit.
Conference on Micromachined Devices and Components <2, 1996, Austin/Tex.>
Symposium on Micromachining and Microfabrication <1996, Austin/Tex.>
Fraunhofer IMS ()
CMOS-Technik; Druckaufnehmer; Strömungsgeschwindigkeitsaufnehmer

Integration of sensors and electronics on the same substrate becomes more and more important. CMOS circuit design seems to be the most important technique for the monolithic approach. Compared to bipolar circuits power consumption is much lower, compared to BICMOS the process is much less complex therefore having a much lower number of masks. This is very important because the most cases monolithic integration means additional process steps and by this a higher process complexity. This paper wants to give a few examples for the monolithic approach in the field of physical sensors based on CMOS-technologies for automotive and for medical applications.