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Comparative study of the roughness of optical surfaces and thin films by x-ray scattering and atomic force microscopy

: Asadchikov, V.E.; Duparre, A.; Jakobs, S.; Karabekov, Y.; Kozhevnikov, I.V.


Applied optics 38 (1999), Nr.4, S.684-691
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Fraunhofer IOF ()
atomic force microscopy; surface roughness; thin films; x-ray scattering

The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.