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CMOS sensor systems

: Hosticka, B.J.

Wise, K.D. ; IEEE Electron Devices Society:
Transducers '97. Digest of technical papers
Piscataway, NJ: IEEE, 1997
ISBN: 0-7803-3829-4
S.991-994 (Vol.2)
International Conference on Solid-State Sensors and Actuators <9, 1997, Chicago/Ill.>
Fraunhofer IMS ()
CMOS analogue integrated circuit; electric sensing devices; elemental semiconductors; integrated circuit design; integrated circuit reliability; silicon

Sensor systems based on CMOS technology benefit not only from capability of silicon to realize both, sensing and electronic functions, but also from the manufacturing maturity that the CMOS technology has reached so far. In this contribution we discuss some of the important issues of the CMOS sensor system design, such as available technologies and devices, design and implementation of sensor electronics, and also pay attention to testing and reliability.