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A CMOS piezoresistive pressure sensor with on-chip programming and calibration


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE International Solid-State Circuits Conference 1993. Digest of technical papers
New York/N.Y., 1993
ISBN: 0-7803-0987-1
International Solid-State Circuits Conference <40, 1993, San Francisco/Calif.>
Fraunhofer IMS ()
analoge integrierte Schaltung; Druckmessung; integrierte Halbleiterschaltung; Meßwandler; microsystem; Mikrosystemtechnik; monolithic integrated circuit; semiconductor circuit; temperature compensation; Temperaturkompensation; thermal compensation; transducer; Wandler

A pressure sensor with on-chip programmable readout and calibration electronics is presented. It features a 30 bit programming capability of sensitivity, offset, stabilized bias, as well as first and second order temperature compensation. The sensor fabrication sequence has been added to a standard CMOS process.