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CMOS compatible capacitive pressure sensor with read-out electronics

: Eichholz, J.; Kandler, M.; Manoli, Y.; Mokwa, W.

Reichl, H.:
Micro-System Technologies '90. 1st International Conference on Micro, Electro, Opto, Mechanic Systems and Components
Berlin: Springer, 1990
ISBN: 0-387-53025-8
ISBN: 3-540-53025-8
International Conference on Micro Electro, Opto, Mechanic Systems and Components <1, 1990, Berlin>
Fraunhofer IMS ()
capacitive pressure sensor; polysilicon membrane; Switched capacitor technique

The fabrication of capacitive pressure sensors using silicon integrated circuit processing is described. The pressure sensors were fabricated using planar etch processing techniques. This results in very small sensors having membrane diameters between 59 micrometer and 150 micrometer. The pressure dependence was studied up to 5 bars. Concepts for on chip signal conditioning by using the switch-capacitor methods are given.