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A chemical microanalysis system as a microfluid system demonstrator



Wise, K.D. ; IEEE Electron Devices Society:
Transducers '97. Digest of technical papers
Piscataway, NJ: IEEE, 1997
ISBN: 0-7803-3829-4
S.303-306 : Lit. (Vol.1)
International Conference on Solid-State Sensors and Actuators <9, 1997, Chicago/Ill.>
Fraunhofer IFT; 2000 dem IZM eingegliedert
calibration; chemical analysis; flow measurement; flowmeters; fluidic devices; micropump; microsensors; valve

An integrated microfluid demonstrator with outer dimensions of 19.5*43 mm2 was developed comprising three micro pumps, three flow sensors, two conductivity sensors and two passive check valves. The devices are mounted onto a silicon backplane, micro channels are etched on its backside to connect all devices. The demonstrator, controlled by a system control, is able to perform a measurement cycle including sensor calibration, sample sucking, conductivity measurement and rinsing. During the development, a proposal concerning a general interfacing standard for microfluid systems was worked out.