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A charge compensation method for measuring passivated devices with high extraction voltage

 
: Lackmann, R.; Weichert, G.

European Conference on Electron and Optical Beam Testing of Integrated Circuits
1991
S.362-373
European Conference on Electron and Optical Beam Testing of Integrated Circuits <3, 1991, Como>
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
Elektronenstrahlmeßtechnik; Ladungskompensation; passivierte integrierte Schaltung

Abstract
The testing of passivated integrated circuits with Electron-Beam Testers (EBT) is of great importance to design verification and failure analysis. Nevertheless it is still burdened with severe problems concerning accuracy of the measurement method. We present some results of extensive measurements on passivated devices providing a better picture of the spatial distribution of the measurable voltage contrast on passivated devices. As an outcome of these investigations a new technique for reducing measurement errors has been found which will be described in detail.

: http://publica.fraunhofer.de/dokumente/PX-7623.html