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Charakterisierung ultrapräzisionsbearbeiteter Materialien mittels Rastersonden-Mikroskopie (ASPE)

Characterization of micromachined surfaces by scanning force microscopy (ASPE)
: Rabe, U.; Arnold, W.; Scherer, V.; Fechner, R.; Schindler, A.; Riemer, O.; Preuß, W.; Brinksmeier, E.

American Society for Precision Engineering -ASPE-:
American Society for Precision Engineering. Ninth Annual Meeting 1994. Proceedings
Raleigh/NC: ASPE, 1994
ISBN: 1-88770-612-7
American Society for Precision Engineering (Annual Meeting) <9, 1994, Cincinnati/Ohio>
Fraunhofer IZFP ()
atomic force microscopy; Diamantdrehen; diamond turning; grain boundary; Korngrenze; Kraftmikroskopie; micromachining; Mikrozerspanung; Oberflächenrauheitsmessung; Rasterkraftmikroskopie; Rastersondenmikroskopie; scanning force microscopy; scanning probe microscopy; surface roughness measurement; Ultrapräzisionsbearbeitung

Micromachined surfaces of polycrystalline copper, aluminium, brass and monocrystalline silicon and germanium were imaged by Scanning Force Microscopy (SFM). We pointed out that the high spatial frequency surface roughness can be measured with the SFM. Grain boundaries and sub-grain structures on diamond-turned surfaces with a spatial wavelength below 1 µm were qualified and quantified. Scratch tests were made on the different materials. SFM images of the grooves showed each material's plastic deformation, and its behaviour in the vincinity of grain boundaries. A critical depth of cut of 40 nm was found, below which chip removal changed, from brittle to ductile mode.