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Title
Transportvorrichtung und Verfahren zum Transport von zu prozessierenden Elementen durch eine Hochtemperaturzone
Date Issued
2002
Author(s)
Patent No
2000-10038556
Abstract
Die vorliegende Erfindung betrifft eine Transportvorrichtung zum Transport von zu prozessierenden Elementen durch eine Hochtemperaturzone sowie ein zugehoeriges Verfahren. Die Transportvorrichtung arbeitet nach dem Hubbalkenprinzip, wobei anstelle von herkoemmlichen Hubbalken duenne langgestreckte Tragelemente aus einem flexiblen Material vorgesehen sind, das entlang der Laengsachsen der Tragelemente unter Zugspannung gehalten wird. Die vorgeschlagene Transportvorrichtung ermoeglicht einen kontaminationsarmen Transport der Elemente durch die Hochtemperaturzone sowie eine verbesserte Energieausbeute und die Moeglichkeit des Einsatzes eines RTP-Prozesses.
DE 10059777 A UPAB: 20020621 NOVELTY - The device has at least one pair of parallel bearer elements extending in the transport direction and at least one drive mechanism producing a repetitive lift and feed movement on a closed curved path so the bearer elements move in the transport direction on the upper half of the path and return to an initial position on a lower half. The elongated bearer elements consist of a flexible material held under tension along their longitudinal axes. DETAILED DESCRIPTION - The device has at least one pair of bearer elements (5a,5b;6a,6b) extending parallel to each other in the transport direction and at least one drive mechanism for them producing a repetitive lift and feed movement on a closed curved path (7) so the bearer elements perform a movement in the transport direction on the upper half of the path and return to an initial position on a lower half. The elongated bearer elements consist of a flexible material held under tension along the longitudinal axes of the bearer elements. INDEPENDENT CLAIMS are also included for the following: a method of transporting elements to be processed, especially substrates or wafers, through high temperature zone. USE - For transporting elements to be processed, especially substrates or wafers, through a temperature zone, especially a high temperature zone. ADVANTAGE - Enables low contamination transport through the high temperature zone, a higher energy yield during processing and faster temperature changes in the high temperature zone.
Language
de
Patenprio
DE 2000-10038556 A1: 20000803