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A CAD coupled laser beam test system for digital circuit failure analysis

: Fritz, J.; Lackmann, R.

Institute of Electrical and Electronics Engineers -IEEE-:
7th IEEE/CHMT International Electronic Manufacturing Technology Symposium 1989. Proceedings
Piscataway/N.J., 1989
International Electronic Manufacturing Technology Symposium <7, 1989, San Francisco/Calif.>
Fraunhofer IMS ()

Laser beam testing of integrated circuits is still largely an unexploited field. Optical beam induced currents (OBIC effect) generated by light absorption and the resulting electron-hole pair creation yield useful informations by outer supply current changes. By means of subsequent signal processing logic state detection using the OBIC effect in CMOS circuits becomes possible by irradiating the drain/substrate junction with the focused laser spot. As an approach towards automated contactless testing the system developed by us consists of a laser scanning microscope (LSM) coupled with the CAD layout data base. Logic state detection and automated failure analysis in CMOS circuits can be done without the need of vacuum and a minimum of circuit environment preparation. The coupling of the LSM and the CAD layout data base leads to automated node location and shortens up the failure search because it enables the user to backtrace signal interconnections inside the circuit during the local te st session.