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Title
Bogenquelle zum Vakuumbeschichten
Date Issued
1992
Author(s)
Reschke, J.
Erbkamm, W.
Nedon, W.
Pochert, R.
Scheffel, B.
Schiller, S.
Schmidt, H.
Patent No
1991-4109213
Abstract
Known arc sources have, among other things, the disadvantage that macroparticles on the substrate to be coated negatively affect layer characteristics. It must be possible to achieve defined vaporization at a high rate free from macroparticles even with small currents. Changing the target should be easy. The known arc source has a pot-shaped cathode housing with a cooled jacket. The target (cathode) is directly attached to its thin-walled base and is replaceable. The magnet system is mounted in a rotatable bearing in the cathode housing directly under the base. The power supply unit for the arc current is connected to an electronic detector, a limiter and a controller in order to program and control the operating parameters of the arc source. The arc source is used for vacuum-coating of electrically conducting layers, preferably for tools, where high wear and tear resistance, adhesive strength and corrosion resistance are demanded.
Language
de
Patenprio
DE 1991-4109213 A: 19910321