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Title
Baueinheit mit einer miniaturisierten elektrostatisch betriebenen Pumpe oder einem Sensor und Verfahren zu deren Herstellung
Date Issued
1992
Author(s)
Haag, J.F.
Kolbeck, A.
Richter, A.
Plettner, A.
Patent No
1991-4105118
Abstract
A process for the manufacture of an assembly comprising a miniaturized actuator or sensor produced by an etching process from a semiconductor material, said actuator or sensor having a body with an active area aligned transversely to the fluid flow direction, in which the active area of the body of the actuator or sensor is covered with blocking elements to prevent the penetration of an encapsulation material, and the body of the actuator or sensor being at least partially covered by an encapsulation material and the blocking elements being removed in order to free the active area.
Language
de
Patenprio
DE 1991-4105118 A: 19910219