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Integration of a pulsed laser deposition source into a conventional MBE-system to produce multilayersystems on a NM-scale

: Dietsch, R.; Holz, T.; Mai, H.; Völlmar, S.
: TU Bergakademie Freiberg, Institut für Mineralogie

Freiberg, 1994
Japanese-German Joint Symposium <1, 1994, Freiberg/Sa.>
Fraunhofer IWS ()
Großflächen-PLD-Quelle; Laserimpulsabscheidung; multilayer; Multischicht; PLD-source for up-scaling; pulsed laser deposition; Röntgenspiegel; X-ray mirror

The conventional thin film deposition equipment of PLD has been modified for the preparation of individual thin solid films and nanometer - layer stacks of uniform thickness across 4"-substrates. Therefore the planar target configuration was replaced by a cylindrical one and the target motion regime has been improved to provide a precise spatial control of the plasma plume orientation.During thin film deposition a substrate translation is preferred instead of the usual rotation technique. With this arrangement the emission characteristic of the plasmasource can be computer controlled and the desired coating can be tailored via a stepper-motor-driven manipulator for the desired layer thickness profile across an extended substrate. Thus, for example, a homogeneous film thickness is obtained even for lower target/substrate distances, and an appropriate deposition rate can be maintained.In a second version this cylinder geometry principle of plasma plume control by target surface morpholog y is extended to a spatial solution. Thus the hemisphericaltarget surface becomes the basic element for inside wall coating of tubes or even more complex hollow bodies.First applications of the equipment are explained and compared with typical results of the conventional technique.