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Information processing in semiconductor manufacturing

 
: Fraunhofer-Institut für Produktionstechnik und Automatisierung -IPA-, Stuttgart

Stuttgart, 1992
Fraunhofer-Institut für Produktionstechnik und Automatisierung (Technologie Forum) <1992, Stuttgart>
Englisch
Tagungsband
Fraunhofer IPA ()
CAM; Chipfertigung; Fertigung; Halbleiter; Halbleiterfertigung; Informationsverarbeitung; semiconductor; semiconductor manufacturing; wafer

Abstract
The offered Technology Forum is a forum where the relevant topices of system integration are discussed in the view of information processing. The subjects of the lectures include all levels of information processing in manufacturing. The following subjects for example are deepened: logging and administration of operational data, control of manufacturing devices, cell controller, CAM system, communication technology (especially SECS).

: http://publica.fraunhofer.de/dokumente/PX-49835.html