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Herstellung ferroelektrischer Dickschichten

Preparation of ferroelectrical thick films
: Müller, F.; Häßler, F.; Seffner, L.

Deutsche Keramische Gesellschaft (Jahrestagung) <1992, Bayreuth>
Fraunhofer IKTS ()
Bleititanat; Dielektrizitätskonstante; ferroelectric hysteresis; ferroelectric thick film; ferroelektrische Hysterese; ferroelektrische Schicht; film preparation; lead titanate; permittivity; Schichtherstellung

Doctor blade technique, tape casting process and plasma spraying combined with subsequent heat treatment are used to produce ferroelectric PZT- layers with a thickness of (100...200)Mym on metallic or metallized ceramic substrates. The ferroelectric properties of these thick films are compared with those of a bulk material of the same substance. During film formation physical and chemical interactions of the film material with substrate and atmosphere take place. Using suitable materials for substrate and metallization, additional adhesive and barrier layers and also low temperature sintering PZT powders makes it possible to produce films which are characterized by values of permitivity of Epsilon bigger than 1000 and a marked P-E-hysteresis. Such films may be applied as transducer and memory elements.