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1997
Conference Paper
Titel
Assembling of micro-optical components
Abstract
In future most microoptical components will be applied as hybrid integrated systems. The manufacturing of beam shaping optics consisting of two or more microoptical components in a hybrid microsystem places demanding requirements on the assembling process due to the need for extreme positioning accuracy. The basis of the micro-assembly system is a high precision robot. The robot is used to handle, to grip and to join the components with minimal position deviations. Various vacuum grippers are described. The dispending of adhesive drops of approximately 5 - 30 nl volume is an essential part of the task.