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Assembling of micro-optical components

: Tittelbach, G.; Eberhardt, R.; Guyenot, V.

Motamedi, M.E.; Hornbeck, L.J.; Pister, K.S.J. ; United States, Defense Advanced Research Projects Agency:
Miniaturized systems with micro-optics and micromechanics II
Bellingham, Wash.: SPIE, 1997 (SPIE Proceedings Series 3008)
ISBN: 0-8194-2419-6
Conference on Miniaturized Systems with Micro-Optics and Micromechanics <2, 1997, San Jose/Calif.>
Fraunhofer IOF ()
adhesive bonding; assembly; micro-optical component; robotic system

In future most microoptical components will be applied as hybrid integrated systems. The manufacturing of beam shaping optics consisting of two or more microoptical components in a hybrid microsystem places demanding requirements on the assembling process due to the need for extreme positioning accuracy. The basis of the micro-assembly system is a high precision robot. The robot is used to handle, to grip and to join the components with minimal position deviations. Various vacuum grippers are described. The dispending of adhesive drops of approximately 5 - 30 nl volume is an essential part of the task.