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Application of porous silicon as a sacrificial layer

 
: Lang, W.; Steiner, P.; Richter, A.; Marusczyk, K.; Weimann, G.; Sandmaier, H.

Denki-gakkai:
Transducers '93. 7th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
1993
ISBN: 4-9900247-2-9
International Conference on Solid-State Sensors and Actuators <7, 1993, Yokohama>
Englisch
Konferenzbeitrag
Fraunhofer IFT; 2000 dem IZM eingegliedert
porous silicon; sacrificial layer; surface micromachining

Abstract
Using porous silicon as a sacrificial layer a surface micromachining (SMM) process with a large distance from the structure to the substrate is realized. The application of this process for making free standing structures of polysilicon and flow channels is described.

: http://publica.fraunhofer.de/dokumente/PX-4385.html