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Application of indentation testing devices for determination of elastic properties of micromechanical components

Einsatz von Eindruckprüfgeräten zur Bestimmung elastischer Eigenschaften von Mikrokomponenten
: Petzold, M.; Heinzelmann, M.; Billep, D.; Mehner, J.

Michel, B.; Winkler, T. ; Deutscher Verband für Materialforschung und -prüfung e.V. -DVM-, Arbeitskreis Mikrosystemtechnik:
Micro Materials, Micro Mat 1995. Proceedings : Werkstofforschung, Werkstoffprüfung, Werkstoffeinsatz in der Mikrosystemtechnik, 28. - 29.11.1995, Berliner Congress Center, BCC
Berlin: DVM, 1995
S.627-630 : Ill., Lit.
Conference Micro Materials (Micro Mat) <1, 1995, Berlin>
Fraunhofer IWM ()

Because of their ability to load very small parts and because of the accuracy in load and displacement determination recent indentation testing devices may also be applied to study elastic properties of micromechanical components in bending experiments. For example, the stiffness of movable parts of different acceleration sensors could be determined by microbending experiments very readily. However, to derive elastic material properties (as Young's modulus) from these investigations requires careful assessment of the measured data. This can be achieved by comparing the experimental results to Finite Element Method (FEM) simulations of bend testing. Micro-bending results on a small silicon cantilever are presented.