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Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths

: Duparre, A.; Gliech, S.

France, C.; Gee, A.E.:
Specification, production, and testing of optical components and systems
Bellingham, Wash.: SPIE, 1996 (Europto series)
ISBN: 0-8194-2160-X
International Symposium on Optical Systems and Production <1996, Glasgow>
Fraunhofer IOF ()
Lichtstreuung; light scattering; Oberflächenrauheit; optical characterization; optische Charakterisierung; surface roughness

A total integrated scattering (TIS) measurement set-up is described which enables the detection of scattered light within a spatial frequency range from 0.0041 mu m(-1) to 4 mu m(-1). The apparatus is based on a Coblentz sphere and is equipped with light sources in the wavelength range from the UV to IR (248 nm - 10.6 mu m). Exemples are presented of measurements on samples with rms-roughness from angstroms to microns.