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  4. X-Ray Structure Investigation of Lateral Surface Nanostructures - A Full Quantitative analysis of Non-Uniform Lattice Strain
 
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1999
Journal Article
Title

X-Ray Structure Investigation of Lateral Surface Nanostructures - A Full Quantitative analysis of Non-Uniform Lattice Strain

Abstract
Single and multilayer surface gratings of the system GaInAs/InP are studied by x-ray diffraction reciprocal space mapping. From the diffraction data we determine the gratting period and shape, the vertical compositional set-up and the non-uniform strain field caused by elastic strain relaxation after surface patterning. In particular, we report a full quantitative strain analysis of such structures. The fitting procedure is based on strain calculation employing linear elasticity theory.
Author(s)
Baumbach, T.
Lübbert, D.
Gailhanou, M.
Journal
Journal of Physics. D. Applied Physics  
DOI
10.1088/0022-3727/32/10A/340
Language
English
Fraunhofer-Institut für Zerstörungsfreie Prüfverfahren IZFP  
Keyword(s)
  • elastic constants

  • nanostructure

  • strain

  • surface characterization

  • x-ray inspection

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