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Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering

: Gliech, S.; Duparre, A.; Recknagel, R.-J.; Notni, G.

Geyl, R. ; European Optical Society -EOS-; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical Fabrication and Testing
Bellingham, Wash.: SPIE, 1999 (SPIE Proceedings Series 3739)
ISBN: 0-8194-3213-X
Conference on Optical Fabrication and Testing <1999, Berlin>
Fraunhofer IOF ()
atomic force microscopy; light scattering; surface roughness; white light interferometry

A variety of technical applications require surface roughnesses to be measured and characterized over a wide range of scale. Therefore, it is inevitable to combine different measurements methods, both optical and nonoptical. In this paper, we present results of white light interferometry, atomic force microscopy, and angle resolved scattering. In addition we use total scattering to control the surface roughness and its inhomogeneities over large sample areas. Power spectral density functions are used to combine the roughness data obtained from the measurements over difference scales and to characterize the surface by means of model PSDs. We present results from different statistically rough surfaces, such as quartz and black glass, Si-wafers, and polished brass surfaces.