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Antiresonant reflecting optical waveguides in strip configuration

 
: Gehler, J.; Bräuer, A.; Karthe, W.

:

Applied Physics Letters 64 (1994), Nr.3, S.276-278
ISSN: 0003-6951
ISSN: 1077-3118
Englisch
Zeitschriftenaufsatz
Fraunhofer IOF ()
arrow; e-beam; Elektronenstrahllithographie; integrated optic; integrierte Optik; RIBE; siliconoxinitrid; Siliziumoxinitrid

Abstract
A monomode antiresonant reflecting optical strip waveguide has been realized in SiON/SiO2/Si. The lateral confinement is provided by strip-loaded reflectors fabricated by e-beam direct writing and reactive ion beam etching (RIBE).

: http://publica.fraunhofer.de/dokumente/PX-4154.html