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Vorrichtung zur Untersuchung von Oberflaechentopographien mittels Streifen-Triangulation

Device for examining surface topographies by means of strip triangulation
 
: Koerner, K.; Holger, F.; Krahn, A.; Puder, J.

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Frontpage ()

DE 1994-4432313 A: 19940912
DE 1994-4432313 A: 19940912
DE 4432313 C2: 20021114
G01B0011
Deutsch
Patent, Elektronische Publikation
Fraunhofer IPK ()

Abstract
The description refers to a device for examining the topographies of light scattering object surfaces, comprising a light source, a Fizeau interferometer consisting of a plane mirror surface and a beam splitter surface inclined in relation to said plane mirror surface, for the generation of an interference fringe pattern, and an image receiver. The invention is characterized by the fact that the beam splitter surface of the Fizeau interferometer is arranged downstream of an optical element having an optically active surface with total reflection effect for bundles reflected several times in the Fizeau interferometer. Alternatively the beam splitter surface of the Fizau interferometer is arranged downstream of an optically active surface having a total relection effect for bundles reflected several times in the Fizeau interferometer in such a way that the beam splitter surface and the optically active surface are surfaces of a prism.

: http://publica.fraunhofer.de/dokumente/PX-40983.html