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Title
Vorrichtung zur Erfassung der Strahllage von Laserstrahlen
Date Issued
1996
Author(s)
Thiel, J.
Lang, M.
Patent No
1990-4026164
Abstract
The description refers to a device for the detection of the beam position of laser beams, for example for measuring linearity, comprising a laser whose laser beam impinges on a position-sensitive sensor, whose output signal is applied to an evaluation unit, which detects position deviations in relation to the laser beam. The invention is characterized by a beam splitter being placed in the path of the laser beam, said beam splitter being capable of splitting the laser beam into the actual measuring laser beam and a reference beam, and a mirror system, which folds the reference beam several times, being placed in the path of the reference beam and a second position-sensitive sensor being located after the mirror system, onto which the sensor impinges and from the resulting output signal of which the evaluation unit determines the changes in direction of the laser beam in space, with which finding the useful branch of the beam position is corrected.
Language
de
Patenprio
DE 1990-4026164 A1: 19900815